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Description
DIAMANTA vacuum system is engineered for the deposition of wear resistant diamond-like carbon (DLC) coatings on silicon and germanium substrates. The DLC coatings are anti-reflective in the IR range in 3-5 μm and 7-14 μm.
The deposition method is the chemical deposition of carbon from the gas phase stimulated by plasma of ion beam source.
The deposition method is the chemical deposition of carbon from the gas phase stimulated by plasma of ion beam source.
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